Speaker
Description
Electron and ion beams have become indispensable tools in surface and material sciences, with an ever-increasing demand for higher resolution. This project aims to develop a Focused Ion Beam (FIB), called FIBback, leveraging two innovative concepts:
• A correlated source of ions and electrons, enabling, among other applications, complete trajectory control of the ion using information from its correlated electron [1, 2].
• A FIB (called ColdFIB) based on a cesium atom beam collimated by laser, excited to a Rydberg state, and then ionized by an electric field [3, 4].
We aim to enhance the resolution of ColdFIB through a novel and original approach: the spatial correlation. In fact, there is an existing correlation in position between the electron on its detector and the ion on the sample, both coming from the same atom. This correlation, added to the coincidence detection of the ion/electron pair provides informations about both correlated charged particles, which can be used to enhance the properties of the beam. Beam resolution will be improved either by utilizing real-time trajectory control of each ion [1], or through ghost imaging [2]. This new FIB prototype will also provide a deterministic ion source.
With this innovative FIB, we aim to achieve nanometer-scale resolution at low energy, paving the way for high-resolution, non-destructive imaging applications and deterministic implantation experiments.
References
[1] C. Lopez, A. Trimeche, D. Comparat, and Y. Picard, Physical Review Applied 11, 064049 (2019).
[2] A. Trimeche, C. Lopez, D. Comparat, and Y. Picard, Physical Review Research 2, 043295 (2020).
[3] M. Reveillard et al., Microscopy and Microanalysis 24, 804 (2018)..
[4] M. Viteau et al., Ultramicroscopy 164, 70 (2016).
